Document
About this Digital Document
An investigation was undertaken to evaluate a particle counting technique using a position sensitive detector for measuring the charge exchange cross sections in ion implantation equipment. A laboratory apparatus was built to simulate the environment of an ion implantation machine by collimating a radioactive source of alpha particles.
Full Title
Charge Exchange Measurements for Helium
Member of
Contributor(s)
Creator: Schoderbek, Robert J.
Thesis advisor: Kim, Yong W.
Publisher
Lehigh University
Date Issued
1973-11
Language
English
Type
Genre
Form
electronic documents
Department name
American Studies
Digital Format
electronic documents
Media type
Creator role
Graduate Student
Identifier
1048262370
https://asa.lib.lehigh.edu/Record/10947446
Keywords
Schoderbek, . R. J. (1973). Charge Exchange Measurements for Helium (1–). https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/charge-exchange
Schoderbek, Robert J. 1973. “Charge Exchange Measurements for Helium”. https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/charge-exchange.
Schoderbek, Robert J. Charge Exchange Measurements for Helium. Nov. 1973, https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/charge-exchange.
