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Influence of deposition temperature and front gate materials on negative fixed charges at alumina-silicon interfaces

About this Digital Document

In this paper, the negative fixed charge at alumina-silicon interfaces is investigated. First, sample electrical behavior after aging in a glove box for eight months was investigated and the capacitance-voltage (C-V) curves did not significantly change. I

Full Title
Influence of deposition temperature and front gate materials on negative fixed charges at alumina-silicon interfaces
Contributor(s)
Creator: Cui, Yuxing
Thesis advisor: Strandwitz, Nicholas C.
Publisher
Lehigh University
Date Issued
2020-08
Language
English
Type
Genre
Form
electronic documents
Department name
Materials Science and Engineering
Digital Format
electronic documents
Media type
Creator role
Graduate Student
Subject (LCSH)
Cui, . Y. (2020). Influence of deposition temperature and front gate materials on negative fixed charges at alumina-silicon interfaces (1–). https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/influence-9
Cui, Yuxing. 2020. “Influence of Deposition Temperature and Front Gate Materials on Negative Fixed Charges at Alumina-Silicon Interfaces”. https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/influence-9.
Cui, Yuxing. Influence of Deposition Temperature and Front Gate Materials on Negative Fixed Charges at Alumina-Silicon Interfaces. Aug. 2020, https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/influence-9.