Document
About this Digital Document
Full Title
Fluorine enhanced oxidation of silicon and related phenomena in silicon /
Member of
Contributor(s)
Creator: Kim, Unsoon
Thesis advisor: Jaccodine, Ralph J.
Publisher
Lehigh University
Date Issued
1986
Language
English
Type
Genre
Form
electronic documents
Department name
Materials Science and Engineering
Digital Format
electronic documents
Media type
Creator role
Graduate Student
Identifier
15516049
https://asa.lib.lehigh.edu/Record/266663
Keywords
Kim, . U. (1986). Fluorine enhanced oxidation of silicon and related phenomena in silicon / (1–). https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/fluorine-1
Kim, Unsoon. 1986. “Fluorine Enhanced Oxidation of Silicon and Related Phenomena in Silicon ”. https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/fluorine-1.
Kim, Unsoon. Fluorine Enhanced Oxidation of Silicon and Related Phenomena in Silicon . 1986, https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations/fluorine-1.
