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Atomic-Layer-Deposited Aluminum Oxide Thin Films Probed with X-ray Scattering and Compared to Molecular Dynamics and Density Functional Theory Models

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Contributor(s)
Publisher
American Chemical Society (ACS)
Date Issued
2022-11-04
Language
English
Type
Genre
Form
electronic document
Media type
Creator role
Faculty
Identifier
2470-1343
Has this item been published elsewhere?
Volume
7
Volume
45
Pugliese, . A., Shyam, . B., Repa, . G. M., Nguyen, . A. H., Mehta, . A., Webb III, . E. B., Fredin, . L. A., & Strandwitz, . N. C. (2022). (Vols. 45). https://doi.org/10.1021/acsomega.2c04402
Pugliese, Anthony, Badri Shyam, Gil M. Repa, Anh Hung Nguyen, Apurva Mehta, Edmund B. Webb III, Lisa A. Fredin, and Nicholas C. Strandwitz. 2022. https://doi.org/10.1021/acsomega.2c04402.
Pugliese, Anthony, et al. 4 Nov. 2022, https://doi.org/10.1021/acsomega.2c04402.