Text

An analysis of anti reflective materials for the manufacture of semiconductor devices

About this Digital Document

Full Title
An analysis of anti reflective materials for the manufacture of semiconductor devices
Member of
Theses and Dissertations
Contributor(s)
Creator: Marshall, Glenn A.
Thesis advisor: Young, Donald R.
Publisher
Lehigh University
Date Issued
1992-12
Language
English
Type
Text
Genre
theses
Form
electronic documents
Department name
Computer Science and Electrical Engineering
Digital Format
electronic documents
Media type
application/pdf
Creator role
Graduate Student
Identifier
27455368
https://asa.lib.lehigh.edu/Record/380857
Keywords
Electrical engineering

Citation


        
      

              

        
@mastersthesis{marshall1992,
  title = {An analysis of anti reflective materials for the manufacture of semiconductor devices},
  author = {Marshall, Glenn},
  year = {1992},
  month = dec,
  publisher = {Lehigh University},
  url = {https://asa.lib.lehigh.edu/Record/380857},
  keywords = {Electrical engineering},
  language = {English},
}