Text

A characterization of BPTEOS glass utilized in VLSI processing

About this Digital Document

Full Title
A characterization of BPTEOS glass utilized in VLSI processing
Member of
Theses and Dissertations
Contributor(s)
Creator: Carbonetto, Tracey A.
Thesis advisor: Jaccodine, Ralph J.
Publisher
Lehigh University
Date Issued
1994-05
Language
English
Type
Text
Genre
theses
Form
electronic documents
Department name
Materials Science and Engineering
Digital Format
electronic documents
Media type
application/pdf
Creator role
Graduate Student
Identifier
31429674
https://asa.lib.lehigh.edu/Record/407820
Keywords
Engineering
Materials science
Carbonetto, . T. A. (1994). A characterization of BPTEOS glass utilized in VLSI processing (1–). https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations-66
Carbonetto, Tracey A. 1994. “A Characterization of BPTEOS Glass Utilized in VLSI Processing”. https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations-66.
Carbonetto, Tracey A. A Characterization of BPTEOS Glass Utilized in VLSI Processing. May 1994, https://preserve.lehigh.edu/lehigh-scholarship/graduate-publications-theses-dissertations/theses-dissertations-66.