Master of Science
Materials Science and Engineering
In this paper, the negative fixed charge at alumina-silicon interfaces is investigated. First, sample electrical behavior after aging in a glove box for eight months was investigated and the capacitance-voltage (C-V) curves did not significantly change. I
Cui, Yuxing, "Influence of deposition temperature and front gate materials on negative fixed charges at alumina-silicon interfaces" (2020). Theses and Dissertations. 5751.