Master of Science
Yong W. Kim
An investigation was undertaken to evaluate a particle counting technique using a position sensitive detector for measuring the charge exchange cross sections in ion implantation equipment. A laboratory apparatus was built to simulate the environment of an ion implantation machine by collimating a radioactive source of alpha particles.
Schoderbek, Robert J., "Charge Exchange Measurements for Helium" (1973). Theses and Dissertations. 4218.