Master of Science
Materials Science and Engineering
Smyth, Donald M.
The effects of nitrogen on the properties of anodic oxides formed on tantalum thin films reactively sputtered in nitrogen were investigated.
Simmons, Russell, "Dielectric properties of anodic oxides formed on thin films of reactively sputtered nitrided tantalum" (1972). Theses and Dissertations. 4081.