Date

1972

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Notis, Michael R.

Abstract

The R.F. sputtering of nickel alloys was investigated to characterize the interrelationship of the deposition parameters and to determine the compositional and microstructural variation of the deposited thin films.

Comments

Former department name: Metallurgy and Materials Science

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