Master of Science
Photolithography is the process of using photosensitive plastic coatings to define areas to be etched on semiconductor slices. The photolithographic facilities are described and equipment operation and process instructions are given. Some methods of evaluating the photolithography process are discussed, and the resluts of experimental evaluation of two photo-resist products are described.
Wolbach, John Robert, "Photolithography for microelectronics" (1972). Theses and Dissertations. 4032.