Date

1971

Document Type

Thesis

Degree

Master of Science

Department

Electrical Engineering

First Adviser

Daniel Leenov

Abstract

A measuring system developed by J. A. Copeland to directly plot the doping profile of a semiconductor wafer, has been built to facilitate the research group at Lehigh University engaged in semiconductor device. The technique involves generation of the second harmonic voltage obtained by driving a Schottky diode with a small constant RF current on the order of a few hundred microamperes at a fundamental frequency of 4.5 MHz.

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