Master of Science
A measuring system developed by J. A. Copeland to directly plot the doping profile of a semiconductor wafer, has been built to facilitate the research group at Lehigh University engaged in semiconductor device. The technique involves generation of the second harmonic voltage obtained by driving a Schottky diode with a small constant RF current on the order of a few hundred microamperes at a fundamental frequency of 4.5 MHz.
Leela, Miss B. S., "A measuring system for continuous plotting of the doping profile of a semiconductor wafer" (1971). Theses and Dissertations. 3898.