Date

1970

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Notis, Michael R.

Abstract

Tantalum-aluminum alloy thin films were prepared by sputtering from a series of cathodes which were fabricated from mixtures of tantalum and aluminum powders and plasma sprayed on cathode bases. The film composition was sensitive to changes in substrate temperature, therefore, it is felt that substrate temperature can be used to obtain limited variations in film composition from a given cathode.

Comments

Former department name: Metallurgy and Materials Science

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