Master of Science
Materials Science and Engineering
Notis, Michael R.
Tantalum-aluminum alloy thin films were prepared by sputtering from a series of cathodes which were fabricated from mixtures of tantalum and aluminum powders and plasma sprayed on cathode bases. The film composition was sensitive to changes in substrate temperature, therefore, it is felt that substrate temperature can be used to obtain limited variations in film composition from a given cathode.
Cowan, Richard Lee, "The electronic properties and conduction mechanism of sputtered, sigma-phase, tantalum-aluminum alloy thin films" (1970). Theses and Dissertations. 3862.