Date

1968

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Tauber, Richard N.

Abstract

Thin films were prepared by sputtering Ta and A1203 simultaneously from a single cathode. The films were easily anodized and produced stable, high value resistors.

Comments

Former department name: Metallurgy and Materials Science

Included in

Metallurgy Commons

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