Date

1967

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Krauss, George E.

Abstract

Heusler alloy (Cu2MnSn) thin films were deposited onto quartz substrates by the techniques of cathodic sputtering. X-ray flourescenece techniques of cathodic sputtering. X-ray flourescence techniques used to determine the chemical composition of the films indicated that the sputtering rates of all components of the allow were essentially the same and that the films were of the same composition as the cathode.

Comments

Former department name: Metallurgy and Materials Science

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Metallurgy Commons

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