Master of Science
Materials Science and Engineering
Krauss, George E.
The primary objectives of this paper were to investigate the effects of deposition rate and substrate temperature on the grain structure and resistivity of thin aluminum films produced by electron beam vapor deposition. Secondary objectives were to study the mechanism of film growth and annealing.
Blumstein, Martin Bernard, "The structure and resistivity of aluminum thin films deposited on amorphous substrates by electron beam evaporation" (1966). Theses and Dissertations. 3464.