Date

1966

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Conard, George P.

Abstract

The investigation indicated that at both lower and higher nitrogen doping levels, the specific resistivity of the deposited thin film was predominantly a function of the nature of the phase, while at the intermediate nitrogen doping levels, residual reactive gas inpurities had a considerable effect on the specific resistivity.

Comments

Former department name: Metallurgy and Materials Science

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