Date

1966

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Libsch, Joseph F.

Abstract

Aluminum thin films were deposited on amorphous substrates by getter sputtering. The effects of substrate temperature and deposition rate on the growth, structure, and electrical properties of the films were studied with the aid of electron microscopy.

Comments

Former department name: Metallurgy and Materials Science

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