Master of Science
Materials Science and Engineering
Libsch, Joseph F.
Aluminum thin films were deposited on amorphous substrates by getter sputtering. The effects of substrate temperature and deposition rate on the growth, structure, and electrical properties of the films were studied with the aid of electron microscopy.
Covington, Carl W., "A study of aluminum thin films prepared by getter spurting on amorphous substrates" (1966). Theses and Dissertations. 3434.