Master of Science
Materials Science and Engineering
Wood, John D.
Thin tantalum films on the order of 5500 A, sputtered onto soda lime glass substrates in an argon atmosphere, were evaluated for an open-ended continuous in-line machine system and a bell jar system for various modes of deposition. All analyses were conducted before and after a 90-minute boiling HCl treatment. It has been found that an unidentifiable crystalline phase is the predominant structure of the tantalum thin films in this investigation.
Durn, LaRue Roland, "An investigation of sputtered tantalum thin films" (1966). Theses and Dissertations. 3432.