Master of Science
Materials Science and Engineering
Krauss, George E.
One type of active electronic device in wide use today is made from doped silicon. These silicon devices as presently used are discrete and individually encapsulated. New applications have developed as a result of the manufacturing economies and increased reliability resulting when these devices are employed in thin film microcircuits. These microcircuits, intermediate to the modular construction of electronic units, consist of discrete active and passivethin film devices and their associated interconnections, all deposited on a suitable substrate. This potential application makes additional research on the deposition of silicon thin films desirable.
Thompson, James M., "The properties, structure and heat treatment of thin p-type silicon films deposited on amorphous fused silica by cathodic sputtering" (1965). Theses and Dissertations. 3391.