Date

1964

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Krauss, George E.

Abstract

Spectrographic analysis reveal that the only essential difference between films sputtered from the differenct source materials was the presence in the films of the intentional source impurities. In view of the marked differences in resistivities observed it is believed that the electrical behavior of the crystalline films is dominated by impurity effects.

Comments

Former department name: Metallurgy and Materials Science

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