Master of Science
Materials Science and Engineering
Kraft, R Wayne.
The rapid growth of the thin film industry in recent years has required sophisticated measuring techniques to determine the various physical properties of the film. The objective of this research is to determine, as a function of thickness, the refractive index (N) of tantalum oxide produced by anodizing sputtered tantalum thin films.
Hause, Stanley S., "The determination of the refractive index of tantalum oxide films grown by anodizing sputtered tantalum" (1964). Theses and Dissertations. 3252.