Date

1964

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Kraft, R Wayne.

Abstract

The rapid growth of the thin film industry in recent years has required sophisticated measuring techniques to determine the various physical properties of the film. The objective of this research is to determine, as a function of thickness, the refractive index (N) of tantalum oxide produced by anodizing sputtered tantalum thin films.

Comments

Former department name: Metallurgy and Materials Science

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