Date
1993
Document Type
Thesis
Degree
Master of Science
Department
Polymer Science and Engineering
First Adviser
Hess, Dennis W.
Other advisers/committee members
Novembre, Anthony E.
Recommended Citation
Stohl, Michael William, "Research on a silicon containing electrom beam resist for use in optical mask manufacture" (1993). Theses and Dissertations. 222.
https://preserve.lehigh.edu/etd/222