The properties, structure and heat treatment of thin p-type silicon films deposited on amorphous fused silica by cathodic sputtering
The properties, structure and heat treatment of thin p-type silicon films deposited on amorphous fused silica by cathodic sputtering
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The properties, structure and heat treatment of thin p-type silicon films deposited on amorphous fused silica by cathodic sputtering. (1965). The properties, structure and heat treatment of thin p-type silicon films deposited on amorphous fused silica by cathodic sputtering.