Date

2013

Document Type

Thesis

Degree

Master of Science

Department

Materials Science and Engineering

First Adviser

Watanabe, Masashi

Abstract

Scanning transmission electron microscopy in scanning electron microscopy (STEM-IN-SEM) is a convenient technique for polymer characterization. Utilizing the lower accelerating voltages, larger field of view and, exclusion of post-specimen projection lens in an SEM; STEM-IN-SEM has shown results comparable to transmission electron microscopy (TEM) observation of polymer morphology. Various specimen-holder geometries and detector arrangements have been used for bright field (BF) STEM-IN-SEM imaging. To further the characterization potential of STEM-IN-SEM a new specimen holder has been developed to facilitate simultaneous BF and dark field (DF) STEM-IN-SEM imaging. A new specimen holder and a new microscope configuration were designed for this new imaging technique. BF and DF signals were maximized for optimal STEM-IN-SEM imaging. BF signal intensities were found to be twice as large as DF signal intensities. BF and DF STEM-IN-SEM imaging spatial resolutions are limited to 1.8 nm and approximately 5 nm, respectively. Simultaneous BF & DF STEM-IN-SEM imaging is applicable to both industrial and academic research environments. Examples of commodity and engineering polymer morphology characterization are provided. Results are comparable to TEM observation and may serve as a suitable precursor to STEM characterization of polymer systems. Finally, future developments of various accessories for this technique are discussed.

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