Date

2013

Document Type

Dissertation

Degree

Doctor of Philosophy

Department

Materials Science and Engineering

First Adviser

Vinci, Richard P.

Other advisers/committee members

Brown, Walter; Tansu, Nelson; Dierolf, Volkmar

Abstract

The overarching theme of this body of work is the development and demonstration of sapphire substrates with sub-micron scale surface features laid out in arrays with controlled shape, size, and distribution. The key contributions of the work are: (1) the collaborative demonstration that such substrates enable novel GaN fabrication options like the Abbreviated Growth Mode (AGM) approach that can lead to lower cost, higher quality LED devices, (2) the proof-of-concept demonstration that large scale surface patterning with the use of anodic aluminum oxide (AAO) templates is a feasible approach for creating low-cost patterns that should be compatible with AGM, and (3) that the Aluminum-to-sapphire conversion process used to fabricate the surface structures has distinct zones of behavior with regard to feature size and temperature that can be used to suggest an optimized set of process conditions.

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